The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Jul. 06, 2018
Applicant:
Semes Co., Ltd., Chungcheongnam-do, KR;
Inventors:
Mong-Ryong Lee, Gyeonggido, KR;
Miyoung Jo, Busan, KR;
Yerim Yeon, Hwaseong-si, KR;
Anton Koriakin, Chungcheongnam-do, KR;
Assignee:
SEMES CO., LTD., Chungcheongnam-Do, KR;
Primary Examiner:
Int. Cl.
CPC ...
C11D 11/00 (2006.01); C11D 17/00 (2006.01); C11D 3/43 (2006.01); C11D 3/37 (2006.01);
U.S. Cl.
CPC ...
C11D 11/0047 (2013.01); C11D 3/37 (2013.01); C11D 3/3707 (2013.01); C11D 3/378 (2013.01); C11D 3/43 (2013.01); C11D 17/0013 (2013.01);
Abstract
Disclosed are a substrate treating apparatus and a substrate treating method. The substrate treating apparatus includes a support member which supports a substrate; a treatment liquid discharging member which discharges a treatment liquid containing a monomeric substance to the substrate located in the support member; and a light irradiator which irradiates light to the treatment liquid discharged to the substrate.