The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2020
Filed:
Apr. 30, 2018
Applicant:
L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;
Inventors:
Feng Li, San Jose, CA (US);
Sonia Plaza, Fremont, CA (US);
Jean-Marc Girard, Versailles, FR;
Nicolas Blasco, Grenoble, FR;
Yumin Liu, San Jose, CA (US);
Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C01G 41/04 (2006.01); C30B 33/02 (2006.01); C30B 35/00 (2006.01);
U.S. Cl.
CPC ...
C01G 41/04 (2013.01); C30B 33/02 (2013.01); C30B 35/002 (2013.01); C01P 2002/70 (2013.01);
Abstract
Conditioning of tungsten pentachloride to form specific crystalline phases is disclosed. The specific crystalline phases permit stable vapor pressures over extended periods of time during vapor deposition and etching processes.