The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 14, 2020

Filed:

Jun. 03, 2019
Applicant:

Gigaphoton Inc., Tochigi, JP;

Inventors:

Kouji Kakizaki, Oyama, JP;

Osamu Wakabayashi, Oyama, JP;

Assignee:

Gigaphoton Inc., Tochigi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/0622 (2014.01); G02B 21/36 (2006.01); H01S 3/094 (2006.01); H03K 7/08 (2006.01); B23K 26/08 (2014.01); B23K 26/53 (2014.01); B23K 26/03 (2006.01); H01M 2/14 (2006.01); B23K 26/042 (2014.01); B23K 26/32 (2014.01); B23K 26/40 (2014.01); H01M 8/1069 (2016.01); H01J 37/244 (2006.01); H01J 37/285 (2006.01); H01J 37/04 (2006.01); H01J 49/00 (2006.01);
U.S. Cl.
CPC ...
B23K 26/0622 (2015.10); B23K 26/032 (2013.01); B23K 26/042 (2015.10); B23K 26/0624 (2015.10); B23K 26/0861 (2013.01); B23K 26/32 (2013.01); B23K 26/40 (2013.01); B23K 26/53 (2015.10); G02B 21/361 (2013.01); H01J 37/045 (2013.01); H01J 37/244 (2013.01); H01J 37/285 (2013.01); H01J 49/0004 (2013.01); H01M 2/14 (2013.01); H01M 8/1069 (2013.01); H01S 3/094076 (2013.01); H03K 7/08 (2013.01); H01J 2237/2446 (2013.01); H01J 2237/24495 (2013.01); H01J 2237/24507 (2013.01); H01J 2237/24592 (2013.01);
Abstract

A laser processing system includes a wavelength tunable laser apparatus capable of changing the wavelength of pulsed laser light to be outputted, an optical system irradiating a workpiece with the pulsed laser light, a reference wavelength acquisition section acquiring a reference wavelength corresponding to photon absorption according to the material of the workpiece, a laser processing controller controlling the wavelength tunable laser apparatus to perform preprocessing before final processing performed on the workpiece, changes the wavelength of the pulsed laser light over a predetermined range containing the reference wavelength, and performs wavelength search preprocessing at a plurality of wavelengths, a processed state measurer measuring a processed state on a wavelength basis achieved by the wavelength search preprocessing performed at the plurality of wavelengths, and an optimum wavelength determination section assessing the processed state on a wavelength basis to determine an optimum wavelength used in the final processing.


Find Patent Forward Citations

Loading…