The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2020
Filed:
May. 09, 2014
Ev Group E. Thallner Gmbh, St. Florian am Inn, AT;
Thomas Glinsner, St. Florian am Inn, AT;
Christoph Flotgen, St. Florian am Inn, AT;
Johann Bernauer, St. Florian am Inn, AT;
Thomas Wagenleitner, Aurolzmunster, AT;
Thomas Wieser, Kirchdorf am Inn, DE;
Florian Schmid, Ried im Innkreis, AT;
Thomas Plach, Stadl-Paura, AT;
Roman Anzengruber, Riedau, AT;
Alexander Nones, Obernberg am Inn, AT;
Uwe Kriebisch, St. Florian am Inn, AT;
EV Group E. Thallner GmbH, St. Florian am Inn, AT;
Abstract
A device for bombarding at least one substrate with a plasma with a first electrode and a second electrode that can be arranged opposite thereto, which electrodes are formed together producing the plasma between the electrodes wherein at least one of the electrodes is formed from at least two electrode units. In addition, this invention relates to a corresponding method.