The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2020
Filed:
Mar. 23, 2018
Lasertec Corporation, Kanagawa, JP;
Tsunehito Kohyama, Kanagawa, JP;
Haruhiko Kusunose, Kanagawa, JP;
Kiwamu Takehisa, Kanagawa, JP;
Hiroki Miyai, Kanagawa, JP;
Itaru Matsugu, Kanagawa, JP;
LASERTEC CORPORATION, Kanagawa, JP;
Abstract
A correction method according to an embodiment includes illuminating an object to be inspected by using critical illumination by illumination light Lgenerated by a light source, concentrating light from the object to be inspected illuminated by the illumination light Land acquiring image data of the object to be inspected by detecting the concentrated light by a first detector, concentrating part of the illumination light L, and acquiring image data of a brightness distribution of the illumination light Lby detecting the concentrated illumination light Lby a second detector, and correcting the image data of the object to be inspected based on the image data of the brightness distribution.