The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2020
Filed:
Mar. 21, 2017
Kabushiki Kaisha Nihon Micronics, Tokyo, JP;
Kabushiki Kaisha Nihon Micronics, Tokyo, JP;
Abstract
Provided is a probe card with which the adjustment of height deviations of needle tip parts of probes and the adjustment of parallelism between the probes and an object to be inspected are simplified. The probe cardhas: a wiring substratehaving wiringtherein or on a surface thereof or the like; a plurality of probes; and a dielectric film. The dielectric filmis disposed to be spaced a distance away from a main surfaceof the wiring substrateat a position spaced away further from the wiring substratethan the needle tip partsof the probes, so that one surfaceof the dielectric filmfaces the needle tip partsand faces the main surfacethat is a probe installation surface of the wiring substrate. The probe cardconfigures a state in which the needle tip partsface an electrode of an object to be inspected with the dielectric filminterposed between the probe cardand the needle tip parts, during an inspection of the object to be inspected. An inspection signal supplied from an inspection device to the probesis set as an alternating current signal, and the probe cardcauses capacitive coupling between the needle tip partsand the electrode of the object to be inspected, and transmits the inspection signal.