The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2020
Filed:
Sep. 13, 2016
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jeonghoon Oh, San Jose, CA (US);
Tsz-Sin Siu, Hong Kong, HK;
Hung Chih Chen, Sunnyvale, CA (US);
Andrew J. Nagengast, Sunnyvale, CA (US);
Steven M. Zuniga, Soquel, CA (US);
Thomas B. Brezoczky, Los Gatos, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/30 (2012.01); B24B 41/06 (2012.01); B29C 35/02 (2006.01); B29C 33/42 (2006.01); B29L 31/00 (2006.01); B29K 23/00 (2006.01); B29K 83/00 (2006.01);
U.S. Cl.
CPC ...
B24B 37/30 (2013.01); B24B 41/06 (2013.01); B29C 33/424 (2013.01); B29C 35/02 (2013.01); B29K 2023/00 (2013.01); B29K 2083/00 (2013.01); B29K 2995/0074 (2013.01); B29L 2031/755 (2013.01);
Abstract
A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.