The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2020

Filed:

May. 06, 2019
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Chao-Ching Cheng, Hsinchu, TW;

Chen-Feng Hsu, Hsinchu, TW;

Yu-Lin Yang, Hsinchu County, TW;

Jung-Piao Chiu, Kaohsiung, TW;

Tzu-Chiang Chen, Hsinchu, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 29/165 (2006.01); H01L 29/06 (2006.01); H01L 29/10 (2006.01); H01L 29/205 (2006.01); H01L 21/8238 (2006.01); H01L 21/8258 (2006.01); H01L 21/762 (2006.01); H01L 29/739 (2006.01); H01L 27/092 (2006.01); H01L 21/84 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7849 (2013.01); H01L 21/76224 (2013.01); H01L 21/8258 (2013.01); H01L 21/823807 (2013.01); H01L 21/823821 (2013.01); H01L 21/823878 (2013.01); H01L 27/0924 (2013.01); H01L 29/0649 (2013.01); H01L 29/1054 (2013.01); H01L 29/165 (2013.01); H01L 29/205 (2013.01); H01L 29/6653 (2013.01); H01L 29/66356 (2013.01); H01L 29/66795 (2013.01); H01L 29/7391 (2013.01); H01L 29/785 (2013.01); H01L 21/845 (2013.01); H01L 27/1211 (2013.01);
Abstract

A method for forming a semiconductor structure includes receiving a substrate including a dielectric structure; forming a first recess in the substrate; forming a dielectric spacer over a sidewall of the first recess; forming a first semiconductor layer to fill the first recess; removing the dielectric structure to form a second recess over the substrate; and forming a second semiconductor layer to fill the second recess. The dielectric spacer is sandwiched between the first semiconductor layer and the second semiconductor layer.


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