The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2020

Filed:

Oct. 15, 2018
Applicant:

Unimicron Technology Corp., Taoyuan, TW;

Inventors:

Yu-Hua Chen, Hsinchu, TW;

Fu-Yang Chen, Miaoli County, TW;

Chun-Hsien Chien, New Taipei, TW;

Chien-Chou Chen, Hsinchu County, TW;

Wei-Ti Lin, Hsinchu County, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 49/02 (2006.01); H01L 23/522 (2006.01); H01L 23/498 (2006.01); H01L 23/15 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 28/60 (2013.01); H01L 23/15 (2013.01); H01L 23/49811 (2013.01); H01L 23/5223 (2013.01); H01L 23/5226 (2013.01); H01L 23/53233 (2013.01);
Abstract

A manufacturing method of a substrate structure includes the following steps. A first build-up circuit structure is formed. At least one copper pillar is formed on the first build-up circuit structure. A dielectric layer is formed on the first build-up circuit structure, and the dielectric layer wraps the copper pillar. A second build-up circuit structure and a capacitive element are formed on the dielectric layer. In particular, the second build-up circuit structure and the first build-up circuit structure are respectively located at two opposite sides of the dielectric layer. The capacitive element is disposed in a capacitive element setting region within the second build-up circuit structure. The copper pillar penetrates the dielectric layer and is electrically connected to the second build-up circuit structure and the first build-up circuit structure. A substrate structure obtained by the manufacturing method of the substrate structure is provided.


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