The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2020

Filed:

Jun. 18, 2018
Applicant:

Nikka Seiko Co., Ltd., Tokyo, JP;

Inventors:

Tsuyoshi Tadano, Tokyo, JP;

Masafumi Hirose, Tokyo, JP;

Daisuke Tomita, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 21/78 (2006.01); B23K 26/40 (2014.01); H01L 21/67 (2006.01); H01L 21/268 (2006.01); B23K 26/18 (2006.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
H01L 23/562 (2013.01); B23K 26/18 (2013.01); B23K 26/40 (2013.01); H01L 21/268 (2013.01); H01L 21/6715 (2013.01); H01L 21/78 (2013.01); B23K 2101/40 (2018.08);
Abstract

A protective film material for laser processing comprises a solution of a water-soluble adhesive and a water-soluble laser beam absorbent added to adjust absorbance at a wavelength of 355 nm (absorbance as calculated as a 200-times diluted solution) to 0.3 to 3. The protective film effectively absorbs an irradiated laser beam, reduces generation of debris during laser beam irradiation, and can be removed by washing with water after completion of the laser processing treatment, thereby providing reliable processing. The water-soluble adhesive is preferably a blend of polyvinyl alcohol and poly-N-vinyl acetamide, which are preferably blended at a ratio of 100 to 200:1 in terms of amounts of respective components.


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