The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2020

Filed:

Sep. 27, 2018
Applicant:

Formfactor Beaverton, Inc., Beaverton, OR (US);

Inventors:

Christopher Storm, Hillsboro, OR (US);

Michael E. Simmons, Colton, OR (US);

Bryan Conrad Bolt, Beaverton, OR (US);

Gavin Neil Fisher, Fenny Compton, GB;

Anthony Lord, Banbury, GB;

Kazuki Negishi, Beaverton, OR (US);

Assignee:

FormFactor Beaverton, Inc., Beaverton, OR (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/06 (2006.01); G01R 1/067 (2006.01); G01R 1/04 (2006.01); H01L 21/687 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 1/06705 (2013.01); G01R 1/0416 (2013.01); G01R 1/06794 (2013.01); G01R 31/2863 (2013.01); G01R 31/2865 (2013.01); G01R 31/2874 (2013.01); G01R 31/2887 (2013.01); H01L 21/68785 (2013.01);
Abstract

Probe systems for testing a device under test are disclosed herein. The probe systems include a platen that defines an upper surface, an opposed lower surface, and a platen aperture. The probe systems also include a chuck that defines a support surface configured to support a device under test. The probe systems further include a lower enclosure extending from the lower surface of the platen and an upper enclosure extending from the upper surface of the platen. The upper enclosure includes a side wall that defines a side wall aperture, and the side wall and the platen define an intersection angle of at least 30 degrees and at most 60 degrees. The probe systems also include a manipulator, a probe shaft arm, a probe assembly, a test head, and an electrical conductor.


Find Patent Forward Citations

Loading…