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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10695862 B1

PDFFull Text
Date of Patent:
Jun. 30, 2020

Filed:

Dec. 12, 2017

Laser processing apparatus

Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Hiroshi Nomura, Tokyo, JP;

Masahiro Tsukamoto, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:

Greer Burns & Crain Ltd.

Primary Examiner:

Lori L Baker

Int. Cl.
CPC ...
B23K 26/04 (2014.01); B23K 26/50 (2014.01); B23K 26/359 (2014.01); H01L 21/677 (2006.01); H01L 21/68 (2006.01); H01L 21/67 (2006.01); B23K 26/082 (2014.01); B23K 26/70 (2014.01); B23K 26/03 (2006.01); B23K 26/40 (2014.01); H01L 21/78 (2006.01); B23K 103/00 (2006.01); B23K 37/04 (2006.01);
U.S. Cl.
CPC ...
B23K 26/04 (2013.01); B23K 26/032 (2013.01); B23K 26/082 (2015.10); B23K 26/359 (2015.10); B23K 26/40 (2013.01); B23K 26/50 (2015.10); B23K 26/702 (2015.10); H01L 21/67092 (2013.01); H01L 21/67766 (2013.01); H01L 21/681 (2013.01); B23K 37/04 (2013.01); B23K 2103/56 (2018.08); H01L 21/78 (2013.01);
Abstract

A laser processing apparatus for processing a plate-shaped workpiece by applying a laser beam to the workpiece, includes a cassette table for placing thereon a cassette in which a plurality of workpieces are accommodated, a carrying-out unit for carrying out the workpiece from the cassette placed on the cassette table, and a laser beam applying unit including a focusing unit for applying the laser beam to the workpiece held on the chuck table. The carrying-out unit carries out the workpiece having been processed by the laser beam applying unit from the chuck table, and accommodates the workpiece into the cassette placed on the cassette table.

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