The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2020

Filed:

Mar. 13, 2019
Applicant:

Toshiba Memory Corporation, Minato-ku, Tokyo, JP;

Inventors:

Marina Yamaguchi, Yokkaichi Mie, JP;

Shoichi Kabuyanagi, Yokkaichi Mie, JP;

Masumi Saitoh, Yokohama Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/24 (2006.01); H01L 45/00 (2006.01); H01L 23/528 (2006.01); G11C 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 27/249 (2013.01); G11C 13/0007 (2013.01); H01L 23/528 (2013.01); H01L 45/08 (2013.01); H01L 45/1233 (2013.01); H01L 45/1253 (2013.01); H01L 45/146 (2013.01); G11C 2213/15 (2013.01); G11C 2213/32 (2013.01); G11C 2213/52 (2013.01); G11C 2213/71 (2013.01);
Abstract

According to one embodiment, a memory device includes a first conductive layer, a second conductive layer, and a first layer. A direction from the first conductive layer toward the second conductive layer is aligned with a first direction. The first layer is provided between the first conductive layer and the second conductive layer. The first layer includes a first region including titanium and oxygen, a second region including aluminum and oxygen and being provided between the first conductive layer and the first region, and a third region including aluminum and oxygen and being provided between the first region and the second conductive layer. A surface area in a first plane of a brookite region included in the first region is 58 percent or more of a surface area in the first plane of the first region. The first plane crosses the first direction.


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