The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2020
Filed:
Oct. 12, 2018
International Business Machines Corporation, Armonk, NY (US);
Michael Rizzolo, Albany, NY (US);
Theodorus E. Standaert, Clifton Park, NY (US);
Isabel Cristina Chu, Melrose, NY (US);
Chih-Chao Yang, Glenmont, NY (US);
Son Nguyen, Schenectady, NY (US);
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Abstract
A method for fabricating a semiconductor device includes forming one or more encapsulation spacers each about respective ones of one more memory pillar elements to have a geometry, including forming each encapsulation spacer to have a footing of at least about twice a critical dimension of its corresponding pillar, and depositing dielectric material on the one or more memory pillar elements and the one or more encapsulation spacers to form an interlayer dielectric free of voids based on the geometry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile