The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 23, 2020

Filed:

May. 08, 2018
Applicant:

Vanguard International Semiconductor Corporation, Hsinchu, TW;

Inventors:

Fu-Hsin Chen, Jhudong Township, TW;

Shin-Cheng Lin, Tainan, TW;

Yung-Hao Lin, Jhunan Township, TW;

Hsin-Chih Lin, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/06 (2006.01); H01L 29/06 (2006.01); H01L 29/20 (2006.01); H01L 29/205 (2006.01); H01L 49/02 (2006.01); H01L 29/66 (2006.01); H01L 21/76 (2006.01); H01L 21/8252 (2006.01); H01L 29/778 (2006.01); H02M 3/335 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0605 (2013.01); H01L 21/7605 (2013.01); H01L 21/8252 (2013.01); H01L 28/20 (2013.01); H01L 29/0649 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 29/66462 (2013.01); H01L 29/7787 (2013.01); H02M 3/33523 (2013.01);
Abstract

A semiconductor structure includes a substrate, a first III-V compound layer, a second III-V compound layer, a third III-V compound layer, and a fourth III-V compound layer. The top of the substrate includes a first region and a second region. The first III-V compound layer is in the first region. The second III-V compound layer is disposed over the first III-V compound layer. A first carrier channel is formed between the first III-V compound layer and the second III-V compound layer. The second III-V compound layer has a first thickness. The third III-V compound layer is in the second region. The fourth III-V compound layer is disposed over the third III-V compound layer. A second carrier channel is formed between the fourth III-V compound layer and the third III-V compound layer. The fourth III-V compound layer has a second thickness less than the first thickness.


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