The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2020
Filed:
May. 04, 2017
Applicant:
Disco Corporation, Tokyo, JP;
Inventor:
Naotoshi Kirihara, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B23K 26/0622 (2014.01); B23K 26/351 (2014.01); B23K 26/382 (2014.01); H01L 21/687 (2006.01); H01L 21/78 (2006.01); B23K 26/359 (2014.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67092 (2013.01); B23K 26/0622 (2015.10); B23K 26/351 (2015.10); B23K 26/359 (2015.10); B23K 26/382 (2015.10); H01L 21/68714 (2013.01); H01L 21/78 (2013.01); B23K 2101/40 (2018.08);
Abstract
A laser oscillator of a laser processing apparatus generates burst pulses each composed of a plurality of sub-pulses. The plurality of sub-pulses are generated in such a manner that the energy of the sub-pulse sequentially changes from a lower energy to a higher energy, and the burst pulses are applied to a wafer, whereby the wafer is formed therein with shield tunnels extending from the front surface to the back surface of the wafer and each being composed of a minute hole and an amorphous phase surrounding the minute hole.