The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2020

Filed:

May. 04, 2017
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Fu-Hsiung Yang, Zhongli, TW;

Long-Shih Lin, Zhubei, TW;

Kun-Ming Huang, Taipei, TW;

Chih-Heng Shen, Zhubei, TW;

Po-Tao Chu, New Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/08 (2006.01); H01L 21/02 (2006.01); H01L 21/265 (2006.01); H01L 21/306 (2006.01); H01L 29/66 (2006.01); H01L 29/739 (2006.01); H01L 21/266 (2006.01); H01L 21/324 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0821 (2013.01); H01L 21/02236 (2013.01); H01L 21/266 (2013.01); H01L 21/26513 (2013.01); H01L 21/30604 (2013.01); H01L 21/324 (2013.01); H01L 29/0649 (2013.01); H01L 29/0692 (2013.01); H01L 29/0804 (2013.01); H01L 29/0834 (2013.01); H01L 29/6625 (2013.01); H01L 29/66325 (2013.01); H01L 29/7393 (2013.01);
Abstract

A method of making a bipolar transistor includes patterning a first photoresist over a collector region of the bipolar transistor, the first photoresist defining a first opening. The method further includes performing a first implantation process through the first opening. The method further includes patterning a second photoresist over the collector region, the second photoresist defining a second opening different from the first opening. The method further includes performing a second implantation process through the second opening, wherein a dopant concentration resulting from the second implantation process is different from a dopant concentration resulting from the first implantation process.


Find Patent Forward Citations

Loading…