The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2020
Filed:
Jun. 01, 2017
Applicant:
Unity Semiconductor, Montbonnot-Saint-Martin, FR;
Inventor:
Sylvain Petitgrand, Caissargues, FR;
Assignee:
UNITY SEMICONDUCTOR, Montbonnot-Saint-Martin, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01); G01N 21/95 (2006.01); H01L 21/673 (2006.01); G01R 31/28 (2006.01); G01B 11/06 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G01B 11/0608 (2013.01); G01R 31/2891 (2013.01); H01L 21/67346 (2013.01);
Abstract
A device for positioning an integrated circuit wafer includes: Also provided is an inspection equipment for an integrated circuit wafer implementing such a positioning device.