The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2020
Filed:
Jun. 27, 2016
Applied Materials, Inc., Santa Clara, CA (US);
Kevin M. Brashear, San Jose, CA (US);
Zhiyuan Ye, San Jose, CA (US);
Justin Hough, San Jose, CA (US);
Jaidev Rajaram, Bangalore, IN;
Marcel E. Josephson, San Jose, CA (US);
Ashley M. Okada, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selection of a flow path through one of the flow restrictors based on an MFC's set point. Mass flow rates may be determined via pressure and temperature measurements upstream of the flow restrictors under choked flow conditions. Methods of verifying a mass flow rate based on choked flow principles are also provided, as are other aspects.