The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2020
Filed:
Oct. 08, 2015
Manz Cigs Technology Gmbh, Schwabisch Hall, DE;
Matthias Gang, Michelbach a.d. Bilz, DE;
Michael Pisch, Schwabisch Hall, DE;
Michael Schafer, Altenstadt, DE;
Jens Schuster, Gemmrigheim, DE;
Ralf Sorgenfrei, Vorstetten, DE;
Georg Voorwinden, Stuttgart, DE;
NICE SOLAR ENERGY GMBH, Schwäbisch Hall, DE;
Abstract
A measuring assembly and method for layer thickness measurement of a layer applied to a substrate by means of a vapor deposition method includes a measuring head which is provided with at least one vibration plate, an extraction line which can be coupled in a gas-conducting or vapor-conducting manner with a first end having a vacuum chamber for the vapor deposition method and which can be coupled in a gas-conducting or vapor-conducting manner with an opposite second end having the measuring head, wherein the extraction line includes at least one heating section or at least one cooling section.