The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2020
Filed:
Dec. 23, 2019
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Inventors:
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F23G 7/06 (2006.01); H05G 2/00 (2006.01); F23G 5/50 (2006.01); F23G 5/12 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
F23G 7/065 (2013.01); F23G 5/12 (2013.01); F23G 5/50 (2013.01); H05G 2/008 (2013.01); F23G 2207/101 (2013.01); F23G 2207/102 (2013.01); F23G 2207/112 (2013.01); F23G 2209/141 (2013.01); G03F 7/70033 (2013.01); G03F 7/70916 (2013.01);
Abstract
An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.