The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2020
Filed:
Oct. 25, 2018
Applicant:
Winbond Electronics Corp., Taichung, TW;
Inventors:
Assignee:
Winbond Electronics Corp., Taichung, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 45/00 (2006.01); B24B 1/00 (2006.01);
U.S. Cl.
CPC ...
H01L 45/1253 (2013.01); H01L 45/1233 (2013.01); H01L 45/146 (2013.01); H01L 45/1608 (2013.01); H01L 45/1616 (2013.01); H01L 45/1666 (2013.01); H01L 45/1675 (2013.01); B24B 1/00 (2013.01);
Abstract
A resistive memory, a manufacturing method thereof, and a chemical mechanical polishing process are provided. The resistive memory includes a first electrode, a variable resistance layer, and a second electrode. The first electrode is disposed on a substrate. The variable resistance layer is disposed on the first electrode. The second electrode is disposed on the variable resistance layer. The first electrode includes a first Ti layer, a Ti oxide layer, and a conductive layer sequentially disposed on the substrate.