The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2020

Filed:

Nov. 08, 2018
Applicant:

Jsr Corporation, Tokyo, JP;

Inventors:

Hiroyuki Ishii, Tokyo, JP;

Hitoshi Katou, Tokyo, JP;

Hiroki Ishikawa, Tokyo, JP;

Noriko Kitahama, Tokyo, JP;

Hirofumi Sasaki, Tokyo, JP;

Hikaru Mizuno, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/48 (2006.01); C09J 171/12 (2006.01); C09J 171/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6835 (2013.01); C09J 171/00 (2013.01); C09J 171/12 (2013.01); H01L 21/4853 (2013.01); C08G 2650/56 (2013.01); H01L 2221/68372 (2013.01); H01L 2221/68386 (2013.01);
Abstract

A workpiece treating method includes a step (1) of forming a stack including a support, a temporary fixing material and a workpiece wherein the material includes a layer containing a polymer (A) in a range of not less than 50 mass %, the polymer (A) including a structural unit represented by the formula (A1), and the workpiece is held on the material; a step (2) of processing the workpiece and/or transporting the stack; and a step (3) of applying a shear force to the material to thereby separate the workpiece from the support. Ris a divalent organic group including at least one aromatic ring, each of two oxygen atoms bonded to Rin (A1) is bonded to the aromatic ring, and, when Rincludes two or more aromatic rings, each of the two oxygen atoms is bonded to any one of the aromatic rings.


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