The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2020
Filed:
Feb. 27, 2017
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/02 (2006.01); B08B 7/00 (2006.01); H01L 21/677 (2006.01); B08B 3/08 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02101 (2013.01); B08B 3/08 (2013.01); B08B 7/0021 (2013.01); H01L 21/6704 (2013.01); H01L 21/67109 (2013.01); H01L 21/67742 (2013.01); H01L 21/67748 (2013.01); H01L 21/68742 (2013.01); H01L 21/68785 (2013.01); H01L 21/02054 (2013.01);
Abstract
Disclosed is a substrate processing apparatus. The substrate processing apparatus includes a container body, and a holding member that conveys the substrate from an outside of the container body into the container body and holds the substrate inside the container body during the processing. A substrate support pin supporting a wafer and a cooling plate cooling the holding member are provided outside the container body.