The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2020
Filed:
May. 31, 2016
Asml Netherlands B.v., Veldhoven, NL;
Stoyan Nihtianov, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A measurement system for measuring a position and/or displacement of an object (), the measurement system comprising a sensor () and a target (), the sensor comprising an electromagnet (); a driving circuit () configured to drive the electromagnet to generate an alternating magnetic field (AMF); a measuring circuit () configured to measure an electrical impedance parameter of the electromagnet; the target being located on a surface () of the object that faces the sensor, wherein the target comprises a graphene layer (), and wherein, in use, when the alternating magnetic field interacts with the target, the alternating magnetic field changes (RMF), altering the electrical impedance parameter of the electromagnet.