The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2020
Filed:
Jun. 22, 2017
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Holger Muenz, Aalen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A method for adjusting the magnification scale of an optical imaging device for exposing or inspecting substrates is provided. The optical imaging device includes a first optical element group, which includes a plurality of first optical elements in an imaging beam path. The method includes replacing optical elements of the first optical element group in the imaging beam path by optical elements of a second optical element group for the purposes of adjusting the magnification scale. The first optical element group includes two reflecting optical elements with first optical parameters, which define a first Petzval sum. The second optical element group includes two reflecting optical elements with second optical parameters, which define a second Petzval sum. The value of the first Petzval sum is at least substantially identical to the value of the second Petzval sum.