The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2020
Filed:
Apr. 18, 2016
National Tsing Hua University, Hsinchu, TW;
Tsong-Pyng Perng, Hsinchu, TW;
Chi-Chung Kei, Hsinchu, TW;
Chien-Pao Lin, Hsinchu, TW;
Mrinalini Mishra, Hsinchu, TW;
Sheng-Hsin Huang, Hsinchu, TW;
Kuang-I Liu, Hsinchu, TW;
Yu-Hsuan Yu, Hsinchu, TW;
National Tsing Hua University, Hsinchu, TW;
Abstract
An enclosed-channel reactor system is provided, which includes: a reactor body having a plurality of enclosed channels therein; an upper cap disposed at one end of the reactor body and having an inlet port communicating with the plurality of enclosed channels; a lower cap disposed at the other end of the reactor body opposite to the upper cap and having an outlet port communicating with the plurality of enclosed channels; and at least a conduit plate disposed between the upper cap and the reactor body for guiding a precursor injected from the inlet port into the plurality of enclosed channels uniformly.