The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2020

Filed:

Mar. 20, 2015
Applicant:

Mitsubishi Materials Corporation, Tokyo, JP;

Inventors:

Toshihiro Doi, Naka-gun, JP;

Hideaki Sakurai, Naka-gun, JP;

Nobuyuki Soyama, Matsudo, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H01L 41/318 (2013.01); C01G 25/00 (2006.01); C04B 35/491 (2006.01); C04B 35/622 (2006.01); C04B 35/624 (2006.01); C04B 35/626 (2006.01); C04B 35/634 (2006.01); C04B 35/638 (2006.01); C04B 35/64 (2006.01); C09D 5/24 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1876 (2013.01); C01G 25/006 (2013.01); C04B 35/491 (2013.01); C04B 35/624 (2013.01); C04B 35/6264 (2013.01); C04B 35/62218 (2013.01); C04B 35/638 (2013.01); C04B 35/63444 (2013.01); C04B 35/64 (2013.01); C09D 5/24 (2013.01); H01L 41/318 (2013.01); C01P 2002/54 (2013.01); C04B 2235/3229 (2013.01); C04B 2235/3234 (2013.01); C04B 2235/3249 (2013.01); C04B 2235/3296 (2013.01); C04B 2235/48 (2013.01);
Abstract

A composition for forming a Ce-doped PZT-based piezoelectric film contains: PZT-based precursors containing metal atoms configuring the composite metal oxides; a diol; and polyvinylpyrrolidone. The PZT-based precursors are contained so that a metal atom ratio (Pb:Ce:Zr:Ti) in the composition satisfies (1.00 to 1.28):(0.005 to 0.05):(0.40 to 0.55):(0.60 to 0.45) and the total of Zr and Ti in a metal atom ratio is 1. A concentration of the PZT-based precursor in 100 mass % of the composition is from 17 mass % to 35 mass % in terms of an oxide concentration, a rate of diol in 100 mass % of the composition is from 16 mass % to 56 mass %, and a molar ratio of polyvinylpyrrolidone to 1 mole of the PZT-based precursor is 0.01 moles to 0.25 moles in terms of monomers.


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