The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2020
Filed:
Jun. 28, 2018
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Inventors:
Cheng-Ta Wu, Chiayi County, TW;
Chii-Ming Wu, Taipei, TW;
Shiu-Ko Jangjian, Tainan, TW;
Kun-Tzu Lin, Tainan, TW;
Lan-Fang Chang, Yunlin County, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/423 (2006.01); H01L 21/02 (2006.01); H01L 21/3115 (2006.01); H01L 29/66 (2006.01); H01L 21/8238 (2006.01); H01L 21/28 (2006.01); H01L 27/092 (2006.01); H01L 29/40 (2006.01); H01L 29/51 (2006.01); H01L 29/49 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7856 (2013.01); H01L 21/02321 (2013.01); H01L 21/02323 (2013.01); H01L 21/28158 (2013.01); H01L 21/3115 (2013.01); H01L 21/31155 (2013.01); H01L 21/823821 (2013.01); H01L 27/0924 (2013.01); H01L 29/401 (2013.01); H01L 29/42364 (2013.01); H01L 29/512 (2013.01); H01L 29/66795 (2013.01); H01L 29/7843 (2013.01); H01L 29/7851 (2013.01); H01L 29/495 (2013.01); H01L 29/513 (2013.01);
Abstract
A semiconductor device including a gate stack over a substrate. The semiconductor device further includes an interlayer dielectric (ILD) at least partially enclosing the gate stack. The ILD includes a first portion doped with an oxygen-containing material, a second portion doped with a large species material, and a third portion being undoped by the oxygen-containing material and the large species material.