The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2020

Filed:

Mar. 12, 2019
Applicant:

Toshiba Memory Corporation, Tokyo, JP;

Inventors:

Norikatsu Sasao, Kanagawa, JP;

Koji Asakawa, Kanagawa, JP;

Tomoaki Sawabe, Tokyo, JP;

Shinobu Sugimura, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/308 (2006.01); C08K 3/16 (2006.01); C08K 5/56 (2006.01); C08F 220/18 (2006.01); C08F 220/28 (2006.01); C08F 212/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/3081 (2013.01); C08F 212/08 (2013.01); C08F 220/18 (2013.01); C08F 220/28 (2013.01); C08K 3/16 (2013.01); C08K 5/56 (2013.01); H01L 21/3086 (2013.01); C08F 2220/1808 (2013.01); C08F 2220/283 (2013.01);
Abstract

The pattern forming material of an embodiment is a pattern forming material containing a polymer composed of two or more kinds of monomer units, in which a first monomer unit in the monomer units is provided with an ester skeleton having a first carbonyl group and one or more second carbonyl groups which bind to the ester skeleton, among the second carbonyl groups, the second carbonyl group that is farthest from a main chain of the polymer constituting the pattern forming material is present on a linear chain, and a second monomer unit in the monomer units is provided with a crosslinkable functional group on a side chain terminal.


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