The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2020
Filed:
Sep. 22, 2015
Inficon Gmbh, Cologne, DE;
Silvio Decker, Cologne, DE;
INFICON GmbH, Cologne, DE;
Abstract
A method for calibrating a test chamber, which encloses an interior volume (), is designed as a film chamber () comprising at least one flexible wall region (), and is connected in a gas-conducting way to a pressure sensor (), to a vacuum pump (), and via a calibration valve () to a calibration chamber () enclosing a calibration volume (), comprising the following steps: evacuating the film chamber (); measuring the pressure difference inside of the film chamber (); after the evacuation has been completed, connecting the calibration volume () in a gas-conducting manner to the interior volume () of the film chamber () while measuring the pressure change, wherein the pressure in the calibration chamber () is greater than the pressure in the film chamber () before the connection to the film chamber (). A corresponding device is likewise disclosed.