The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2020
Filed:
Oct. 25, 2016
Nuflare Technology, Inc., Yokohama-shi, JP;
Kota Fujiwara, Kamakura, JP;
NuFlare Technology, Inc., Yokohama-shi, JP;
Abstract
A temperature measuring mask includes: a substrate; a temperature sensorbeing provided to the substrate, and being capable of sensing a temperature inside a charged particle beam lithography device; a circuit boardbeing provided to the substrate, and including a measuring circuitA that measures the temperature using the temperature sensorand a storage deviceB that stores measurement data of the measured temperature; a secondary cellbeing provided to the substrate, and supplying electric power to the circuitA; and a photoelectric cellbeing provided to the substrate, and generating electric power by being irradiated with an energy beam to charge the secondary cell