The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2020

Filed:

May. 06, 2016
Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Kentaro Odanaka, Tokyo, JP;

Hironari Ohkubo, Tokyo, JP;

Zentaro Kawasaki, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/364 (2014.01); B23K 26/03 (2006.01); B23K 26/06 (2014.01); B23K 26/08 (2014.01); B23K 101/40 (2006.01);
U.S. Cl.
CPC ...
B23K 26/364 (2015.10); B23K 26/032 (2013.01); B23K 26/0665 (2013.01); B23K 26/0853 (2013.01); B23K 2101/40 (2018.08);
Abstract

Disclosed herein is a laser processing apparatus including a controller. The controller includes a target pattern detecting section performing matching between patterns formed in each device imaged and a key pattern to thereby detect a target pattern included in each device, a spacing detecting section detecting the spacing in a Y direction between the target pattern and an ablation groove formed along each division line by ablation, and a map creating section creating a map showing the spacing in the Y direction between each target pattern and the ablation groove for the plural devices arranged along the ablation groove.


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