The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 26, 2020

Filed:

Aug. 14, 2018
Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Makoto Tanaka, Tokyo, JP;

Shinya Yasuda, Tokyo, JP;

Satoshi Hanajima, Tokyo, JP;

Harunobu Yuzawa, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/78 (2006.01); B28D 5/00 (2006.01); B23K 26/364 (2014.01); H01L 21/687 (2006.01); B23K 26/04 (2014.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/78 (2013.01); B23K 26/043 (2013.01); B23K 26/364 (2015.10); B28D 5/0011 (2013.01); B28D 5/0052 (2013.01); B28D 5/0058 (2013.01); H01L 21/68728 (2013.01); H01L 22/00 (2013.01); H01L 21/67092 (2013.01); H01L 21/67253 (2013.01); H01L 21/67259 (2013.01); H01L 21/681 (2013.01);
Abstract

A cutting apparatus includes a cutting unit configured to cut a workpiece held on a chuck table, and a groove detecting unit including a CCD imaging element photographing the workpiece held on the chuck table. The groove detecting unit photographs, by the CCD imaging element, a laser-processed groove and a cut groove illuminated by an oblique illumination set such that a light amount of light in a direction parallel with an extending direction of the laser-processed groove as viewed in plan is higher than a light amount of light in a direction orthogonal to the extending direction of the laser-processed groove.


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