The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2020
Filed:
Mar. 29, 2018
Disco Corporation, Tokyo, JP;
Kenji Takenouchi, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A method for processing a plate-shaped workpiece having a division line and a metal member formed on the division line or in an area corresponding to the division line includes a holding step of holding the workpiece on a chuck table with the metal member oriented downward, a first cutting step of cutting the workpiece along the division line by using a first cutting blade, thereby forming a first cut groove having a bottom not reaching the metal member, and a second cutting step of cutting the workpiece along the first cut groove by using a second cutting blade, thereby forming a second cut groove fully cutting the workpiece along the division line so as to divide the metal member. The second cutting step includes supplying a cutting fluid containing an organic acid and an oxidizing agent to the workpiece.