The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 26, 2020

Filed:

May. 21, 2018
Applicant:

Hitachi Chemical Company, Ltd., Tokyo, JP;

Inventors:

Yasuharu Murakami, Hitachi, JP;

Hiroshi Yamazaki, Hitachi, JP;

Yoshimi Igarashi, Hitachi, JP;

Naoki Sasahara, Hitachi, JP;

Ikuo Mukai, Hitachi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/038 (2006.01); G03F 7/032 (2006.01); G03F 7/00 (2006.01); G06F 3/044 (2006.01); C08G 18/00 (2006.01); G03F 7/004 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); C08F 220/18 (2006.01); G03F 7/031 (2006.01); G03F 7/16 (2006.01); G06F 3/041 (2006.01);
U.S. Cl.
CPC ...
G03F 7/038 (2013.01); C08F 220/18 (2013.01); C08G 18/00 (2013.01); G03F 7/0007 (2013.01); G03F 7/0045 (2013.01); G03F 7/031 (2013.01); G03F 7/032 (2013.01); G03F 7/16 (2013.01); G03F 7/20 (2013.01); G03F 7/32 (2013.01); G03F 7/322 (2013.01); G06F 3/041 (2013.01); G06F 3/044 (2013.01); G06F 2203/04103 (2013.01);
Abstract

The method for forming a resin cured film pattern according to the invention comprises a first step in which there is formed on a base material a photosensitive layer composed of a photosensitive resin composition comprising a binder polymer with a carboxyl group having an acid value of 75 mgKOH/g or greater, a photopolymerizable compound and a photopolymerization initiator, and having a thickness of 10 μm or smaller, a second step in which prescribed sections of the photosensitive layer are cured by irradiation with active light rays, and a third step in which the sections of the photosensitive layer other than the prescribed sections are removed to form a cured film pattern of the prescribed sections of the photosensitive layer, wherein the photosensitive resin composition comprises an oxime ester compound and/or a phosphine oxide compound as the photopolymerization initiator.


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