The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2020

Filed:

Jul. 21, 2016
Applicant:

Massachusetts Institute of Technology, Cambridge, MA (US);

Inventors:

William D. Oliver, Arlington, MA (US);

Rabindra N. Das, Lexington, MA (US);

David J. Hover, Somerville, MA (US);

Danna Rosenberg, Arlington, MA (US);

Xhovalin Miloshi, Needham, MA (US);

Vladimir Bolkhovsky, Framingham, MA (US);

Jonilyn L. Yoder, Billerica, MA (US);

Corey W. Stull, Leominster, MA (US);

Mark A. Gouker, Belmont, MA (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/18 (2006.01); G06N 10/00 (2019.01); H01L 39/22 (2006.01); H01L 39/24 (2006.01); H01P 7/08 (2006.01); H01L 39/04 (2006.01);
U.S. Cl.
CPC ...
H01L 27/18 (2013.01); G06N 10/00 (2019.01); H01L 39/045 (2013.01); H01L 39/223 (2013.01); H01L 39/2416 (2013.01); H01L 39/2493 (2013.01); H01P 7/086 (2013.01);
Abstract

A superconducting integrated circuit includes at least one superconducting resonator, including a substrate, a conductive layer disposed over a surface of the substrate with the conductive layer including at least one conductive material including a substantially low stress polycrystalline Titanium Nitride (TiN) material having an internal stress less than about two hundred fifty MPa (magnitude) such that the at least one superconducting resonator and/or qubit (hereafter called 'device') is provided as a substantially high quality factor, low loss superconducting device.


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