The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 19, 2020

Filed:

Apr. 02, 2015
Applicant:

Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;

Inventors:

Yasuhira Nagakubo, Tokyo, JP;

Toshiyuki Iwahori, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); G01N 1/42 (2006.01); B01L 7/04 (2010.01); B01L 7/00 (2006.01); F25D 3/10 (2006.01); G01N 1/28 (2006.01); F25D 21/04 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); B01L 7/04 (2013.01); B01L 7/50 (2013.01); F25D 3/10 (2013.01); F25D 3/102 (2013.01); F25D 3/105 (2013.01); F25D 21/04 (2013.01); G01N 1/28 (2013.01); G01N 1/42 (2013.01); B01L 2200/0684 (2013.01); B01L 2300/185 (2013.01); H01J 2237/2001 (2013.01); H01J 2237/2002 (2013.01); H01J 2237/204 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/20235 (2013.01);
Abstract

The present invention stores a cooled sample subjected to freezing treatment, or the like, while preventing the formation of condensation and frost-like substances and loads the sample into a sample holder for observation using a charged particle beam device. The present invention is provided with a main body for storing a sample and a lid unit mounted above the main body and is characterized in that the main body is divided into a first space and a second space by a partition member; the first space accommodates a cooling medium for cooling the sample; the second space has, disposed therein, a heating unit for heating the cooling medium accommodated in the first space; and the lid unit has, formed therein, a discharge port for discharging the gas generated by the heating of the cooling medium to the outside.


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