The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2020
Filed:
Mar. 21, 2018
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Holger Muenz, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 9/34 (2006.01); G02B 27/00 (2006.01); G03F 7/20 (2006.01); G02B 13/14 (2006.01); G02B 13/00 (2006.01); G02B 5/18 (2006.01);
U.S. Cl.
CPC ...
G02B 27/005 (2013.01); G02B 13/0035 (2013.01); G02B 13/14 (2013.01); G03F 7/70241 (2013.01); G02B 5/1814 (2013.01); G02B 27/0043 (2013.01);
Abstract
An optical system for field imaging and/or pupil imaging has an optical axis, a stop plane and an image plane. The optical system includes a lens element system that has three lens element groups, each including at least one lens element. The lens element groups are spaced apart from each other along the optical axis between the stop plane and the image plane. The three lens element groups have a first lens element material and/or a second lens element material that differs from the first lens element material.