The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2020
Filed:
Jan. 04, 2018
Globalfoundries Singapore Pte. Ltd., Singapore, SG;
Yamin Huang, Singapore, SG;
Bo Liu, Singapore, SG;
Zhihong Mai, Singapore, SG;
Jeffrey C Lam, Singapore, SG;
GLOBALFOUNDRIES SINGAPORE PTE. LTD., Singapore, SG;
Abstract
Devices with gamma (γ) grooves are disclosed. The γ grooves can be used to form optical fiber arrays. The γ grooves can be formed using a dry etch, such as RIE, by modifying resist features of an etch mask to have convex curved sidewalls. The profile of the resist features is transferred to the substrate by the dry etch to form the γ grooves. The γ grooves are formed without K containing etchants, avoiding Kions contamination of process tools as well as health issues caused by handling alkali containing devices.