The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2020
Filed:
Sep. 28, 2016
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventor:
Shiyu Zhang, Fremont, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); G02B 17/00 (2006.01); G02B 13/22 (2006.01); G02B 21/04 (2006.01); G02B 17/08 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G02B 13/22 (2013.01); G02B 17/004 (2013.01); G02B 21/04 (2013.01); G02B 17/0892 (2013.01);
Abstract
Imaging objectives and inspection systems equipped with such imaging objectives are disclosed. The imaging objective may include a front objective configured to produce a diffraction limited intermediate image. The imaging objective may also include a relay configured to receive the intermediate image produced by the front objective. The relay may include three spherical mirrors positioned to deliver a projection of the intermediate image to a fixed image plane.