The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2020
Filed:
Dec. 13, 2018
Asml Netherlands B.v., Veldhoven, NL;
Michael Johannes Christiaan Ronde, Veldhoven, NL;
Lucas Kuindersma, Veldhoven, NL;
Niels Johannes Maria Bosch, Eindhoven, NL;
Hans Butler, Veldhoven, NL;
Cornelius Adrianus Lambertus De Hoon, Veldhoven, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Thijs Verhees, Veldhoven, NL;
Sander Kerssemakers, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An apparatus having: a system configured to measure an object; a base structure; an object support constructed to hold the object, the object support movably supported on the base structure; a balance mass configured to absorb a reaction force arising from movement of the object support; an actuator connected to the balance mass and the base structure, the actuator configured to apply a force to the balance mass and the base structure; a sensor configured to produce a signal for a measured characteristic of the base structure corresponding to a disturbance, or its effect, acting on the base structure; and a control system configured to determine, based on at least the signal for the measured characteristic of the base structure, a signal for the actuator to apply a force to the base structure and/or the balance mass.