The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2020
Filed:
Nov. 27, 2017
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
TOKYO OHKA KOGYO CO., LTD., Kawasaki-shi, JP;
Abstract
A resist composition including a base component which exhibits changed solubility in a developing solution under action of acid, and a compound (B1) having an anion moiety and a cation moiety and being represented by general formula (b1) (wherein Rto Reach independently represents a hydrogen atom or a hydrocarbon group which may have a substituent, or two or more of Rto Rmay be mutually bonded to form a ring structure, provided that at least two of Rto Rare mutually bonded to form a ring structure, and at least one of Rto Rhas an anion group, and the anion moiety as a whole forms an anion having a valency of n; n represents an integer of 1 or more; represents an integer of 1 or more; and Mrepresents an organic cation having a valency of m).