The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2020

Filed:

Nov. 27, 2017
Applicant:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;

Inventors:

Masatoshi Arai, Kawasaki, JP;

Takaya Maehashi, Kawasaki, JP;

Takuya Ikeda, Kawasaki, JP;

Assignee:

TOKYO OHKA KOGYO CO., LTD., Kawasaki-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 25/18 (2006.01); G03F 7/012 (2006.01); G03F 7/039 (2006.01); C07C 309/12 (2006.01); C07C 381/12 (2006.01); C09D 125/18 (2006.01); C08F 2/46 (2006.01); C08F 212/14 (2006.01); C08F 12/24 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0046 (2013.01); C07C 25/18 (2013.01); C07C 309/12 (2013.01); C07C 381/12 (2013.01); C08F 2/46 (2013.01); C08F 12/24 (2013.01); C08F 212/14 (2013.01); C09D 125/18 (2013.01); G03F 7/0045 (2013.01); G03F 7/0125 (2013.01); G03F 7/0397 (2013.01); C07C 2603/86 (2017.05); C07C 2603/88 (2017.05);
Abstract

A resist composition including a base component which exhibits changed solubility in a developing solution under action of acid, and a compound (B1) having an anion moiety and a cation moiety and being represented by general formula (b1) (wherein Rto Reach independently represents a hydrogen atom or a hydrocarbon group which may have a substituent, or two or more of Rto Rmay be mutually bonded to form a ring structure, provided that at least two of Rto Rare mutually bonded to form a ring structure, and at least one of Rto Rhas an anion group, and the anion moiety as a whole forms an anion having a valency of n; n represents an integer of 1 or more; represents an integer of 1 or more; and Mrepresents an organic cation having a valency of m).


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