The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 12, 2020

Filed:

Jul. 27, 2017
Applicants:

L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;

American Air Liquide, Inc., Fremont, CA (US);

Inventors:

Antonio Sanchez, Tsukuba, JP;

Gennadiy Itov, Flemington, NJ (US);

Manish Khandelwal, Somerset, NJ (US);

Cole Ritter, Easton, PA (US);

Peng Zhang, Montvale, NJ (US);

Jean-Marc Girard, Versailles, FR;

Zhiwen Wan, Plano, TX (US);

Glenn Kuchenbeiser, Newark, DE (US);

David Orban, Hampton, NJ (US);

Sean Kerrigan, Princeton, NJ (US);

Reno Pesaresi, Easton, PA (US);

Matthew Damien Stephens, Easton, PA (US);

Yang Wang, Glen Mills, PA (US);

Guillaume Husson, Wilmington, DE (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C01B 21/087 (2006.01); C04B 35/589 (2006.01); C04B 35/597 (2006.01); C04B 35/14 (2006.01); C09D 1/00 (2006.01); C01B 21/082 (2006.01); B05D 1/02 (2006.01); B05D 1/00 (2006.01); B05D 1/18 (2006.01); C23C 16/24 (2006.01); C08G 77/62 (2006.01); H01L 21/02 (2006.01); C04B 35/571 (2006.01); C04B 35/56 (2006.01); C09D 183/16 (2006.01); C23C 18/12 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C01B 21/087 (2013.01); B05D 1/005 (2013.01); B05D 1/02 (2013.01); B05D 1/18 (2013.01); C01B 21/0823 (2013.01); C04B 35/14 (2013.01); C04B 35/5603 (2013.01); C04B 35/571 (2013.01); C04B 35/589 (2013.01); C04B 35/597 (2013.01); C08G 77/62 (2013.01); C09D 1/00 (2013.01); C09D 183/16 (2013.01); C23C 16/24 (2013.01); C23C 16/45553 (2013.01); C23C 18/122 (2013.01); C23C 18/1275 (2013.01); C23C 18/1291 (2013.01); C23C 18/1295 (2013.01); C04B 2235/483 (2013.01); H01L 21/0214 (2013.01); H01L 21/02222 (2013.01);
Abstract

Solid or liquid N—H free, C-free, and Si-rich perhydropolysilazane compositions comprising units having the following formula [—N(SiH)(SiH—)], wherein x=0, 1, or 2 and y=0, 1, or 2 when x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 when x+y=3 are disclosed. Also disclosed are synthesis methods and applications for the same.


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