The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 05, 2020

Filed:

Jan. 07, 2019
Applicant:

Infineon Technologies Austria Ag, Villach, AT;

Inventors:

Caspar Leendertz, Munich, DE;

Markus Bina, Grosshelfendorf, DE;

Christian Philipp Sandow, Haar, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01); H01L 29/739 (2006.01); H01L 29/40 (2006.01); H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/423 (2006.01); H01L 21/8234 (2006.01); H01L 21/761 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7397 (2013.01); H01L 21/761 (2013.01); H01L 21/823487 (2013.01); H01L 29/0619 (2013.01); H01L 29/0623 (2013.01); H01L 29/0696 (2013.01); H01L 29/1095 (2013.01); H01L 29/407 (2013.01); H01L 29/4236 (2013.01); H01L 29/6634 (2013.01); H01L 29/66333 (2013.01); H01L 29/66348 (2013.01); H01L 29/7393 (2013.01); H01L 29/7395 (2013.01); H01L 29/7813 (2013.01);
Abstract

A power semiconductor device having an IGBT-configuration includes at least one power cell. Each power cell includes at least three trenches arranged laterally adjacent to each other. Each trench extends into a semiconductor body along a vertical direction and includes an insulator that insulates a respective electrode from the semiconductor body. The at least three trenches include at least one control trench whose electrode is electrically coupled to a control terminal, and a source trench whose electrode is electrically coupled to a first load terminal. An active mesa for conduction of at least a part of the load current is laterally confined at least by one of the at least one control trench and includes at least a respective section of each of a source region and a channel region. An auxiliary mesa is laterally confined by the source trench and one of the at least one control trench.


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