Normally-off gallium oxide field-effect transistor

Abstract

The independent claims of this patent signify a concise description of embodiments. Disclosed herein is a normally-off, gallium oxide field-effect transistor. The field-effect transistor comprises a source, a source spacer, a first channel region, a second channel region, a drain spacer, and a drain. The source, the source spacer, the first channel region, the second channel region, the drain spacer, and the drain are of a first conductivity type. All the regions have the same type of doping. The field-effect transistor further includes a gate dielectric over the channel body and a gate over the gate dielectric. The first channel region has a cross-sectional area that is smaller than the second channel region.