The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2020
Filed:
Jan. 07, 2019
Asml Netherlands B.v., Veldhoven, NL;
Hsuan-Bin Huang, Hsinchu, TW;
Chun-Liang Lu, Hsinchu, TW;
Chin-Fa Tu, Hsinchu, TW;
Wen-Sheng Lin, Hsinchu, TW;
Youjin Wang, Milpitas, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A load lock system for charged particle beam imaging with a particle shielding plate, a bottom seal plate and a plurality of sensor units is provided. The sensor units are located above the wafer, the shield plate is designed to have a few number of screws, and the bottom seal plate contains no cable, no contact sensors and fewer screws used. In the invention, the system is designed to improve the contamination particles from components in the load lock system of charged particle beam inspection tool and also to simplify its assembly.