The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2020
Filed:
Feb. 06, 2018
International Business Machines Corporation, Armonk, NY (US);
Romain Lallement, Troy, NY (US);
Stuart A. Sieg, Albany, NY (US);
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Abstract
Embodiments of the invention include techniques for verifying planarization performance using electrical measures, the techniques include modeling, by a processor, a planarization layer for a topography of a device, and designing a chip including one or more structures. The techniques also include measuring electrical characteristics of the one or more structures, and comparing measured electrical characteristics of the one or more structures to target specifications for the one or more structures. Techniques include applying the planarization model to the one or more structures, and correlating the measured electrical characteristics to the planarization layer.