The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2020
Filed:
Oct. 10, 2014
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Sander Frederik Wuister, Eindhoven, NL;
Davide Ambesi, Breda, NL;
Assignee:
ASML Netherlands B.V, Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/70 (2012.01); G03F 7/00 (2006.01); G06F 30/39 (2020.01); G06F 119/18 (2020.01);
U.S. Cl.
CPC ...
G03F 1/70 (2013.01); G03F 7/0002 (2013.01); G06F 30/39 (2020.01); G06F 2119/18 (2020.01);
Abstract
A method of designing a feature guiding template for guiding self-assembly of block copolymer to form at least two features in a design layout for lithography, the feature guiding template including at least two portions joined by a bottleneck, the method including determining a characteristic of the feature guiding template based on at least a function of geometry of the feature guiding template including a value of a first width of at least one of the portions, a value of a second width of the bottleneck, or a value based on both the first width and the second width.