The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2020
Filed:
Apr. 12, 2018
Applicant:
Cabot Microelectronics Corporation, Aurora, IL (US);
Inventors:
Lu Tian, Singapore, SG;
Ke Zhang, Singapore, SG;
Andrew Haerle, Sutton, MA (US);
Hon Wu Lau, Singapore, SG;
Assignee:
Cabot Microelectronics Corporation, Aurora, IL (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); H01L 21/321 (2006.01); G11B 5/84 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); G11B 5/8404 (2013.01); H01L 21/3212 (2013.01);
Abstract
Described are chemical mechanical processing (CMP) compositions and related methods, including compositions and methods for polishing nickel-containing substrate surfaces such as nickel phosphorus (NiP) surfaces for hard disk applications, wherein the compositions contain highly irregular-shaped fused silica abrasive particles.